Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/97428
Title: On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
Authors: Xu, S.
Li, H.-S.
Li, Y.-A.
Lee, S.
Huan, C.H.A. 
Issue Date: 8-May-1998
Source: Xu, S.,Li, H.-S.,Li, Y.-A.,Lee, S.,Huan, C.H.A. (1998-05-08). On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering. Chemical Physics Letters 287 (5-6) : 731-736. ScholarBank@NUS Repository.
Abstract: Polycrystalline β-C3N4 films have been deposited on single-crystal KCl(100) substrates using reactive rf magnetron sputtering. The films have been characterized by transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy. A large number of grains are found distributed in various regions of the film. The dimension of the largest grain is about 4 μm. The film is composed mainly of C and N with a small amount of O. XPS data show N-bonded to sp3-hybridized C with some surface oxidation. The N/C ratio in the β-C3N4 region is deduced to be 1.23-1.27, close to an expected stoichiometric value of 1.33. The TED-measured interplanar spacings suggest that the crystalline grains are hexagonal with lattice parameters of a=6.30 Å and c=2.46 Å.
Source Title: Chemical Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/97428
ISSN: 00092614
Appears in Collections:Staff Publications

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