Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.4801307
Title: Ion beam irradiation induced fabrication of vertical coupling waveguides
Authors: Liang, H.D.
Kumar, V.S.
Wu, J.F.
Breese, M.B.H. 
Issue Date: 1-Apr-2013
Source: Liang, H.D., Kumar, V.S., Wu, J.F., Breese, M.B.H. (2013-04-01). Ion beam irradiation induced fabrication of vertical coupling waveguides. Applied Physics Letters 102 (13) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4801307
Abstract: Vertically coupled waveguides have been fabricated on a silicon-on-insulator platform using a combination of reactive ion etching to pattern the device layer and high-energy proton beam irradiation followed by electrochemical etching to pattern the substrate. Infra-red light can be coupled from the lower rib waveguide within the substrate into the upper waveguide within the device layer. By varying the proton energy along the lower waveguide, we have fabricated a tapered profile which is thin at the coupling region for higher efficiency and thicker towards the outer ends for easier coupling of light. A typical coupling efficiency of 26 has been achieved. © 2013 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/96992
ISSN: 00036951
DOI: 10.1063/1.4801307
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

4
checked on Mar 7, 2018

WEB OF SCIENCETM
Citations

4
checked on Mar 7, 2018

Page view(s)

15
checked on Feb 25, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.