High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications

Abstract

The use of solid state Cockroft-Walton type accelerator to produce high quality secondary electron image was discussed. The study was carried out by using a voltage-modulated dc signal imaging process. A pattern SiGe sample was used to determine the optimum signal-to-noise ratio that can achieved by minimizing the beam fluctuation and increasing the signal intensity. The results show that the intensity of the beam current was varied by changing the size of the microprobe collimator slits to keep all the accelerator parameter constant.