Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2007.02.046
Title: High aspect ratio PDMS replication through proton beam fabricated Ni masters
Authors: van Kan, J.A. 
Wang, L.P.
Shao, P.G. 
Bettiol, A.A. 
Watt, F. 
Keywords: High aspect ratio
Ni stamps
PDMS
Proton beam writing
Soft lithography
Issue Date: Jul-2007
Citation: van Kan, J.A., Wang, L.P., Shao, P.G., Bettiol, A.A., Watt, F. (2007-07). High aspect ratio PDMS replication through proton beam fabricated Ni masters. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 353-356. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.046
Abstract: In application areas where multiple samples are required (for example tissue engineering substrates), proton beam writing (PBW) is a suitable technique to fabricate high quality metal masters. These masters can then be used to replicate multiple copies in polymers, either through nanoimprinting or softlithography. Since poly(dimethyl siloxane) (PDMS) is a compatible material in tissue engineering we explore PDMS casting on Ni masters as an alternative way to replicate high aspect ratio micro structures. Ni masters with grooves spaced 2.5 μm apart, and 13 μm deep were successfully replicated in PDMS: These PDMS structures, which have aspect ratio of more than 5, are comparable to the best high aspect ratios reported in PDMS replication. © 2007 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/96778
ISSN: 0168583X
DOI: 10.1016/j.nimb.2007.02.046
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