Please use this identifier to cite or link to this item: https://doi.org/10.1364/OE.18.14511
Title: Fabrication of concave silicon micro-mirrors
Authors: Ow, Y.S. 
Breese, M.B.H. 
Azimi, S.
Issue Date: 5-Jul-2010
Source: Ow, Y.S.,Breese, M.B.H.,Azimi, S. (2010-07-05). Fabrication of concave silicon micro-mirrors. Optics Express 18 (14) : 14511-14518. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.18.14511
Abstract: We have fabricated spherical and cylindrical concave micromirrors in silicon with dimensions from 20 μm to 100 μm. The fabrication process involves standard photolithography followed by large area ion beam irradiation and electrochemical anodisation in a HF electrolyte. After thermal oxidation the silicon surface roughness is less than 2 nm. We also present a multilayer porous silicon distributed Bragg reflector fabricated on concave silicon surfaces which selectively reflect and focus a band of wavelengths from a parallel beam of incident white light. Development of such low roughness concave microstructures opens up new applications in areas such as silicon photonics and quantum information science. © 2010 Optical Society of America.
Source Title: Optics Express
URI: http://scholarbank.nus.edu.sg/handle/10635/96591
ISSN: 10944087
DOI: 10.1364/OE.18.14511
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