Effects of microstructure on the properties of ferroelectric lead zirconate titanate (PZT) thin films

Abstract

Lead zirconate titanate (PZT) thin films were prepared with pulsed laser deposition and sol-gel techniques. The PZT films fabricated by these two techniques have similar randomly oriented single perovskite phases, but the film derived from the pulsed laser deposition exhibits a more compact and flat morphology. The dielectric, ferroelectric, and piezoelectric properties of the two kinds of films are comparatively characterized and discussed. It is observed that a denser microstructure would lead to a significantly higher dielectric constant and remanent polarization and a much lower coercive electric field, but only a relatively slight enhancement on the piezoelectric constant. The film with a looser microstructure could have a substantially higher piezoelectric voltage constant g33 due to the much lower dielectric constant. Our results and discussion provide a better understanding of the relationship between the microstructure and the film properties, which is essential in order to tailor the microstructure and hence determine the performance aiming at a specific application. © Springer-Verlag 2004.