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|Title:||Effect of nitrogen incorporation on the electronic structure and thermal stability of HfO2 gate dielectric|
|Citation:||Wang, S.J., Chai, J.W., Dong, Y.F., Feng, Y.P., Sutanto, N., Pan, J.S., Huan, A.C.H. (2006). Effect of nitrogen incorporation on the electronic structure and thermal stability of HfO2 gate dielectric. Applied Physics Letters 88 (19) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2202752|
|Abstract:||The effect of nitrogen incorporation on the electronic structure and thermal stability of Hf O2 gate dielectric was investigated by using photoemission study and first-principles calculation. Hafnium oxynitride (HfON) dielectric shows higher thermal stability in comparison to pure Hf O2 on Si. Atomic N can passivate O vacancies in the dielectrics during nitridation process, but the N atoms incorporated into interstitial sites cause band gap reduction. Postnitridation annealing is required to activate interstitial N atoms to form stable N-Hf bonds, which will increase the band gap and band offset of as-nitrided dielectric film. © 2006 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
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