Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1784035
Title: Direct measurement of proton-beam-written polymer optical waveguide sidewall morphorlogy using an atomic force microscope
Authors: Sum, T.C. 
Bettiol, A.A. 
Seng, H.L. 
Van Kan, J.A. 
Watt, F. 
Issue Date: 23-Aug-2004
Citation: Sum, T.C., Bettiol, A.A., Seng, H.L., Van Kan, J.A., Watt, F. (2004-08-23). Direct measurement of proton-beam-written polymer optical waveguide sidewall morphorlogy using an atomic force microscope. Applied Physics Letters 85 (8) : 1398-1400. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1784035
Abstract: The atomic force microscopy (AFM) technique was used to investigate the sidewall morphologies of proton-beam-written polymer waveguide structures fabricated with different stage scanning speeds. The proton-beam writing (PBW) is a direct-write micromachining technique capable of fabaricating low-loss single-mode polymer waveguides with straight and smooth sidewalls. The statistical information such as the rms roughness and the correlation length of the sidewall profile obtained from AFM scans allowed the quantification of the quality of the sidewalls and optimization of the fabrication parameters using PBW. The results show a rms roughness of 3.8±0.3 nm for a stage scanning speed of ∼10 μm/s.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/96238
ISSN: 00036951
DOI: 10.1063/1.1784035
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

15
checked on Nov 10, 2018

WEB OF SCIENCETM
Citations

15
checked on Oct 17, 2018

Page view(s)

60
checked on Oct 5, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.