Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-0233/9/11/018
Title: Designs of multi-target carousels for pulsed-laser deposition systems
Authors: Xu, S.Y. 
Tan, C.W.
Ong, C.K. 
Keywords: Laser-molecular-beam-epitaxy
Multi-layered thin films
Multi-target carousel
Pulsed-laser deposition
Issue Date: Nov-1998
Citation: Xu, S.Y., Tan, C.W., Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/9/11/018
Abstract: For different applications of the pulsed-laser deposition (PLD) technique and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carousel for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustable target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitable, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They are of simple structure, low cost and may be constructed in a normal workshop.
Source Title: Measurement Science and Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/96180
ISSN: 09570233
DOI: 10.1088/0957-0233/9/11/018
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

1
checked on Nov 13, 2018

WEB OF SCIENCETM
Citations

1
checked on Nov 13, 2018

Page view(s)

43
checked on Nov 9, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.