Please use this identifier to cite or link to this item:
|Title:||Designs of multi-target carousels for pulsed-laser deposition systems|
|Authors:||Xu, S.Y. |
Multi-layered thin films
|Citation:||Xu, S.Y., Tan, C.W., Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/9/11/018|
|Abstract:||For different applications of the pulsed-laser deposition (PLD) technique and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carousel for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustable target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitable, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They are of simple structure, low cost and may be constructed in a normal workshop.|
|Source Title:||Measurement Science and Technology|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 15, 2018
WEB OF SCIENCETM
checked on May 22, 2018
checked on May 18, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.