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Title: Designs of multi-target carousels for pulsed-laser deposition systems
Authors: Xu, S.Y. 
Tan, C.W.
Ong, C.K. 
Keywords: Laser-molecular-beam-epitaxy
Multi-layered thin films
Multi-target carousel
Pulsed-laser deposition
Issue Date: Nov-1998
Source: Xu, S.Y.,Tan, C.W.,Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository.
Abstract: For different applications of the pulsed-laser deposition (PLD) technique and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carousel for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustable target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitable, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They are of simple structure, low cost and may be constructed in a normal workshop.
Source Title: Measurement Science and Technology
ISSN: 09570233
DOI: 11/018
Appears in Collections:Staff Publications

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