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|Title:||Designs of multi-target carousels for pulsed-laser deposition systems|
|Authors:||Xu, S.Y. |
Multi-layered thin films
|Citation:||Xu, S.Y., Tan, C.W., Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/9/11/018|
|Abstract:||For different applications of the pulsed-laser deposition (PLD) technique and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carousel for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustable target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitable, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They are of simple structure, low cost and may be constructed in a normal workshop.|
|Source Title:||Measurement Science and Technology|
|Appears in Collections:||Staff Publications|
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