Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/95967
DC Field | Value | |
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dc.title | Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer | |
dc.contributor.author | Taijing, Lu | |
dc.contributor.author | Ng, S.C. | |
dc.date.accessioned | 2014-10-16T09:17:55Z | |
dc.date.available | 2014-10-16T09:17:55Z | |
dc.date.issued | 1994-10 | |
dc.identifier.citation | Taijing, Lu,Ng, S.C. (1994-10). Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. Journal of Materials Research 9 (10) : 2712-2716. ScholarBank@NUS Repository. | |
dc.identifier.issn | 08842914 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/95967 | |
dc.description.abstract | Swirls and oxidation stacking faults (OSF) ring-bands in the near surface region of Si crystals have been detected and characterized by a 180° backscattering Rayleigh-Brillouin spectrometer using an argon-ion laser as its light source. In FZ Si wafers with swirls, the central region exhibits high scattered light with random undulation, the peripheral region with swirls shows a periodic undulation of scattered light intensity, while the region in-between is a nearly uniform zone of low scattered light intensity. In contrast to this, the CZ Si wafers with OSF ring-bands display a low uniformly scattered light background with a high undulated scattered light zone corresponding to the OSF ring-band. The scattered light intensity and its structure in the OSF ring-band vary with the heat-treatment conditions. The features of scattered light detected by the scattering spectrometer are discussed. | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | PHYSICS | |
dc.description.sourcetitle | Journal of Materials Research | |
dc.description.volume | 9 | |
dc.description.issue | 10 | |
dc.description.page | 2712-2716 | |
dc.description.coden | JMREE | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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