Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2009.03.035
Title: Advanced applications in microphotonics using proton beam writing
Authors: Bettiol, A.A. 
Chiam, S.Y. 
Teo, E.J. 
Udalagama, C. 
Chan, S.F.
Hoi, S.K. 
van Kan, J.A. 
Breese, M.B.H. 
Watt, F. 
Keywords: 42.70.Ce
42.82.Et
81.16.Nd
85.40.Hp
Lab-on-a-chip
Metamaterials
Proton beam writing
Silicon photonics
Waveguides
Issue Date: 15-Jun-2009
Source: Bettiol, A.A., Chiam, S.Y., Teo, E.J., Udalagama, C., Chan, S.F., Hoi, S.K., van Kan, J.A., Breese, M.B.H., Watt, F. (2009-06-15). Advanced applications in microphotonics using proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (12-13) : 2280-2284. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.035
Abstract: Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can be used for replication. In recent times we have explored the use of PBW for various advanced optical applications including fabrication of subwavelength metallic structures and metamaterials, direct write of silicon waveguides for mid IR applications and integrated waveguides for lab-on-a-chip devices. This paper will review the recent progress made in these areas with particular emphasis on the main advantages of using the PBW technique for these novel applications. © 2009 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/95737
ISSN: 0168583X
DOI: 10.1016/j.nimb.2009.03.035
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