Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/93268
Title: Characterization of Si(100) surface after high density HBr/Cl2/O2 plasma etching
Authors: Low, C.H.
Chin, W.S. 
Tan, K.L. 
Loh, F.C. 
Zhou, M.
Zhong, Q.H.
Chan, L.H.
Issue Date: Jan-2000
Source: Low, C.H.,Chin, W.S.,Tan, K.L.,Loh, F.C.,Zhou, M.,Zhong, Q.H.,Chan, L.H. (2000-01). Characterization of Si(100) surface after high density HBr/Cl2/O2 plasma etching. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 (1) : 14-19. ScholarBank@NUS Repository.
Abstract: The nature of deposited film on unmasked Si(100) surface after high density HBr/Cl2/O2 plasma etching has been investigated. The as-etched surface was treated sequentially with HF for different duration and monitored with atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). It was found that microscopic Si pillars are formed on the etched surface and might be attributed to the formation of micromasks. XPS surface analysis indicated the passivation film consists mainly of silicon oxides and oxybromides. Ab initio calculations using Si4 cluster model suggested the direct attack of oxyhalide species on the surface as the energetically most favored process. It is also shown that HF treatment for 40s was effective in the complete removal of the residual film.
Source Title: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
URI: http://scholarbank.nus.edu.sg/handle/10635/93268
ISSN: 00214922
Appears in Collections:Staff Publications

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