Please use this identifier to cite or link to this item:
|Title:||Adsorption and reaction of NH3 on Ti/Si(1 0 0)|
|Citation:||Siew, H.L., Qiao, M.H., Chew, C.H., Mok, K.F., Chan, L., Xu, G.Q. (2001-03-22). Adsorption and reaction of NH3 on Ti/Si(1 0 0). Applied Surface Science 173 (1-2) : 95-102. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(00)00896-5|
|Abstract:||The nitridation of ultra-thin Ti films on Si(1 0 0) have been studied using X-ray photoelectron spectroscopy (XPS) in a temperature range of 120-1000 K. Upon ammonia exposure to the multilayer Ti thin films at 120 K, three N 1s peaks at 397.8-398.1, 400.5-400.8 and 402.2-402.6 eV were observed, attributable to NHx (x = 1 or 2), molecular NH3 and NH4 δ+, respectively. Annealing of the NH3 saturated Ti/Si(1 0 0) surfaces results in the conversion of the NHx species. This species undergo two different pathways between 300 and 800 K, i.e. further dissociation to N(a) and H(a), and recombing with H(a) to form NH3(g). The atomic N reacts with Ti to yield a stable TiN film that retards significantly the interdiffusion at the Ti/Si interface.|
|Source Title:||Applied Surface Science|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 16, 2018
WEB OF SCIENCETM
checked on May 28, 2018
checked on May 25, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.