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Title: Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition
Authors: Liu, J.-M. 
Xu, S.Y. 
Zhou, W.Z.
Jiang, X.H.
Ong, C.K. 
Lim, L.C. 
Keywords: Ferroelectric and piezoelectric property
Pulsed laser deposition
PZT thick film
Issue Date: 1999
Source: Liu, J.-M.,Xu, S.Y.,Zhou, W.Z.,Jiang, X.H.,Ong, C.K.,Lim, L.C. (1999). Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition. Materials Science and Engineering A 269 (1-2) : 67-72. ScholarBank@NUS Repository.
Abstract: Completely (001)-oriented Pb(Zr0.52Ti0.48)O3 (PZT) films up to ∼ 10 μm thick, deposited on (100) silicon wafers with Y-stabilized ZrO2 (YSZ) as buffer and YBCO as electrode, are prepared by using pulsed laser deposition. The X-ray rocking curve scanning with respect to (001) reflection of 6.0-μm thick films exhibits the FWHM of only 0.6-0.7°. Small grain size and smooth surface of the as-prepared films were identified. The performance of YSZ as excellent resisting layer against silicon diffusion was confirmed by the SIMS measurements. The electrical property evaluations demonstrated quite good ferroelectric property. A piezoelectric coefficient d31 ∼ -300 pC/N, acceptable for piezoelectric applications, was measured. © 1999 Elsevier Science S.A. All rights reserved.
Source Title: Materials Science and Engineering A
ISSN: 09215093
Appears in Collections:Staff Publications

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