Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-0233/11/5/302
Title: Laser integrated measurement of surface roughness and micro-displacement
Authors: Wang, S.H. 
Tay, C.J. 
Quan, C. 
Shang, H.M. 
Zhou, Z.F.
Keywords: Light scattering
Micro-displacement
Non-contact measurement
Optical triangulation
Surface roughness
Issue Date: May-2000
Citation: Wang, S.H., Tay, C.J., Quan, C., Shang, H.M., Zhou, Z.F. (2000-05). Laser integrated measurement of surface roughness and micro-displacement. Measurement Science and Technology 11 (5) : 454-458. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/11/5/302
Abstract: An optical method based on laser scattering and optical triangulation for measurement of surface roughness and micro-displacement measurement is proposed. The technique allows evaluation of surface roughness and micro-displacement of a specimen using just one device. The principle of the method and the basic instrumentation design are described and the validity of the principle is demonstrated by experimental evaluations. Results show that, for specimens with surface roughnesses (Ra) in the range 0.005-0.1 μm, displacements in the range ±300 μm can be readily measured.
Source Title: Measurement Science and Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/92735
ISSN: 09570233
DOI: 10.1088/0957-0233/11/5/302
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