Please use this identifier to cite or link to this item:
https://doi.org/10.1116/1.1513640
DC Field | Value | |
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dc.title | Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates | |
dc.contributor.author | Yang, G.H. | |
dc.contributor.author | Oh, S.W. | |
dc.contributor.author | Kang, E.T. | |
dc.contributor.author | Neoh, K.G. | |
dc.date.accessioned | 2014-10-09T09:58:45Z | |
dc.date.available | 2014-10-09T09:58:45Z | |
dc.date.issued | 2002-11 | |
dc.identifier.citation | Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G. (2002-11). Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20 (6) : 1955-1963. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1513640 | |
dc.identifier.issn | 07342101 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/92241 | |
dc.description.abstract | The deposition of fluoropolymer films by plasma polymerization and deposition of linear, cyclic and aromatic hydrocarbons on the Ar plasma-pretreated Si surfaces under different glow discharge conditions was reported. The x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, time-of-flight secondary ion mass spectrometry and water contact angle measurements were used to study the effects of radio-frequency plasma power on the chemical composition and structure of plasma-polymerized fluoropolymer films. The results showed strong bonding between Ar plasma-pretreated Si surfaces and the plasma-polymerized and deposited layers. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1116/1.1513640 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | CHEMICAL & ENVIRONMENTAL ENGINEERING | |
dc.description.doi | 10.1116/1.1513640 | |
dc.description.sourcetitle | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | |
dc.description.volume | 20 | |
dc.description.issue | 6 | |
dc.description.page | 1955-1963 | |
dc.description.coden | JVTAD | |
dc.identifier.isiut | 000179441700020 | |
Appears in Collections: | Staff Publications |
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