Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.tsf.2010.06.062
Title: Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique
Authors: Liang, H.K.
Yu, S.F.
Lau, S.P.
Herng, T.S.
Tsang, S.H.
Wang, L.
Chen, J.S. 
Teng, K.S.
Keywords: Filtered cathodic vacuum arc
Magneto-optical properties
Photoluminescence
Thin films
ZnO:metal
Issue Date: 30-Sep-2010
Source: Liang, H.K., Yu, S.F., Lau, S.P., Herng, T.S., Tsang, S.H., Wang, L., Chen, J.S., Teng, K.S. (2010-09-30). Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique. Thin Solid Films 518 (23) : 7048-7052. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2010.06.062
Abstract: Mn doped ZnO (ZnO:Mn) thin films with ∼ 10 at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤ 200 °C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9 × 10-24 A m2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality AR ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime. © 2010 Elsevier B.V.
Source Title: Thin Solid Films
URI: http://scholarbank.nus.edu.sg/handle/10635/86610
ISSN: 00406090
DOI: 10.1016/j.tsf.2010.06.062
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