Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.jmmm.2012.03.027
Title: Nanocomposite L1 0 FePt-SiN x and FePt-SiN x-C films with large coercivity and small grain size on a TiN intermediate layer
Authors: Dong, K.F.
Li, H.H.
Peng, Y.G.
Ju, G.
Chow, G.M. 
Chen, J.S. 
Keywords: Large coercivity
Small grain size
TiN intermediate layer
Issue Date: Aug-2012
Citation: Dong, K.F., Li, H.H., Peng, Y.G., Ju, G., Chow, G.M., Chen, J.S. (2012-08). Nanocomposite L1 0 FePt-SiN x and FePt-SiN x-C films with large coercivity and small grain size on a TiN intermediate layer. Journal of Magnetism and Magnetic Materials 324 (17) : 2637-2644. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmmm.2012.03.027
Abstract: FePt-SiN x-C films with high coercivity, (001) texture and small grain size were obtained by co-sputtering FePt, Si 3N 4 and C on TiN/CrRu/glass substrate at 380°C. Without C doping, FePt-SiN x films with good perpendicular anisotropy and a single layer structure were obtained. However, the grain size was still too large and the grain isolation was poor. When C was doped into the FePt-SiN x films, the out-of-plane coercivity increased due to the decrease of the exchange coupling. In addition, the grain size of the FePt films decreased, and well-separated FePt grains with uniform size were formed. The microstructure of [FePt-SiN x 40 vol%]-20 vol% C films changed from a single layer structure to a multiple layer structure when the FePt thickness was increased from 4 to 10 nm. By optimizing the sputtering process, the [FePt (4 nm)-SiN x 40 vol%]-20 vol% C (001) film with coercivity higher than 21.5 kOe, a single layer structure, and small average FePt grain size of 5.6 nm was obtained, which makes it suitable for ultrahigh density perpendicular recording. © 2012 Elsevier B.V.
Source Title: Journal of Magnetism and Magnetic Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/86583
ISSN: 03048853
DOI: 10.1016/j.jmmm.2012.03.027
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