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|Title:||Nanocomposite L1 0 FePt-SiN x and FePt-SiN x-C films with large coercivity and small grain size on a TiN intermediate layer|
Small grain size
TiN intermediate layer
|Citation:||Dong, K.F., Li, H.H., Peng, Y.G., Ju, G., Chow, G.M., Chen, J.S. (2012-08). Nanocomposite L1 0 FePt-SiN x and FePt-SiN x-C films with large coercivity and small grain size on a TiN intermediate layer. Journal of Magnetism and Magnetic Materials 324 (17) : 2637-2644. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmmm.2012.03.027|
|Abstract:||FePt-SiN x-C films with high coercivity, (001) texture and small grain size were obtained by co-sputtering FePt, Si 3N 4 and C on TiN/CrRu/glass substrate at 380°C. Without C doping, FePt-SiN x films with good perpendicular anisotropy and a single layer structure were obtained. However, the grain size was still too large and the grain isolation was poor. When C was doped into the FePt-SiN x films, the out-of-plane coercivity increased due to the decrease of the exchange coupling. In addition, the grain size of the FePt films decreased, and well-separated FePt grains with uniform size were formed. The microstructure of [FePt-SiN x 40 vol%]-20 vol% C films changed from a single layer structure to a multiple layer structure when the FePt thickness was increased from 4 to 10 nm. By optimizing the sputtering process, the [FePt (4 nm)-SiN x 40 vol%]-20 vol% C (001) film with coercivity higher than 21.5 kOe, a single layer structure, and small average FePt grain size of 5.6 nm was obtained, which makes it suitable for ultrahigh density perpendicular recording. © 2012 Elsevier B.V.|
|Source Title:||Journal of Magnetism and Magnetic Materials|
|Appears in Collections:||Staff Publications|
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