Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3156689
Title: Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy
Authors: Chua, D.H.C. 
Hsieh, J.
Gao, X. 
Qi, D. 
Chen, S. 
Varghese, B. 
Sow, C.H. 
Wee, A.T.S. 
Lu, J.
Loh, K.P. 
Yu, X. 
Moser, H.O. 
Issue Date: 2009
Source: Chua, D.H.C., Hsieh, J., Gao, X., Qi, D., Chen, S., Varghese, B., Sow, C.H., Wee, A.T.S., Lu, J., Loh, K.P., Yu, X., Moser, H.O. (2009). Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy. Journal of Applied Physics 106 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3156689
Abstract: This paper reports a comprehensive experimental study on the effects of hydrogen microwave plasma treatment on nonhydrogenated high s p3 content tetrahedral amorphous carbon (ta-C) film. In this study, a surface C-H dipole layer was first observed by high resolution electron energy loss spectroscopy, showing the presence of C-H bonding states. This resulted in the enhancement of electron field emission of the plasma treated films by largely lowering the turn-on field. Thermal stability tests using in situ ultraviolet photoelectron spectroscopy confirm that the C-H dipole layer not only reduces the work function of the films, it is extremely stable in both ambient and vacuum conditions and can sustain up to 600 °C annealing in vacuum. Atomic force microscopy studies also show minimal modifications to the surface morphology, leading to the conclusion that the C-H dipole layer is responsible for lowering the work function. This has improved the electron emission properties which can lead to potential applications such as electron emission displays. © 2009 American Institute of Physics.
Source Title: Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/86276
ISSN: 00218979
DOI: 10.1063/1.3156689
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