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Title: Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition
Authors: Zhao, J.
Lu, L. 
Thompson, C.V.
Lu, Y.F.
Song, W.D.
Keywords: A3. Laser epitaxy
A3. Pulsed laser deposition
Issue Date: May-2001
Citation: Zhao, J., Lu, L., Thompson, C.V., Lu, Y.F., Song, W.D. (2001-05). Preparation of (0 0 1)-oriented PZT thin films on silicon wafers using pulsed laser deposition. Journal of Crystal Growth 225 (2-4) : 173-177. ScholarBank@NUS Repository.
Abstract: Completely (0 0 1)-oriented Pb(Zr0.52Ti0.48)O3 (PZT) thin films deposited on (1 0 0)-silicon wafers with SrTiO3 (STO)/MgO as a buffer layer system and YBCO as a electrode, were prepared by using KrF excimer pulsed-laser deposition. The epitaxial relationships, i.e. PZT(0 0 1)∥YBCO(0 0 1)∥SrTiO3(1 0 0)∥MgO(1 0 0)∥Si(1 0 0) and PZT(1 1 0) ∥YBCO(1 1 0)∥SrTiO3(0 1 1)∥MgO(0 1 1) were detected using X-ray θ-2θ scans and pole figures or φ-scans. Grain size and surface morphologies of the as-prepared films were examined using atomic force microscopy and scanning electron microscopy. © 2001 Published by Elsevier Science B.V.
Source Title: Journal of Crystal Growth
ISSN: 00220248
DOI: 10.1016/S0022-0248(01)00865-X
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