Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.886251
Title: All-solid-state thin film microbatteries fabricated by rf sputtering
Authors: Feng, J.K. 
Lai, M.O. 
Zeng, X.
Huang, Z.
Lu, L. 
Keywords: Anode
Cathode
Lithium battery
Oxide
Sputtering
Thin film battery
Issue Date: 2011
Source: Feng, J.K., Lai, M.O., Zeng, X., Huang, Z., Lu, L. (2011). All-solid-state thin film microbatteries fabricated by rf sputtering. Proceedings of SPIE - The International Society for Optical Engineering 8035 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.886251
Abstract: Novel high power density cathode and anode materials for thin film battery are reported here. The layered Li(NiMnCo)1/3O2 film fabricated by sputtering shows a capacity as high as 190 mAhg-1 in the range of 3-4.9 V and a capacity retention of 90% after 100 cycles. Novel oxide anode is synthesized by sputtering at room temperature, delivering a special capacity as high as 700 mAhg-1 and a good capacity retention. The thin film battery using these materials shows a good cyclability and high rate ability. © 2011 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/85873
ISBN: 9780819486097
ISSN: 0277786X
DOI: 10.1117/12.886251
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