Please use this identifier to cite or link to this item: https://doi.org/10.1109/TRANSDUCERS.2011.5969767
Title: A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
Authors: Du, Y. 
Zhou, G. 
Cheo, K.K.L. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Keywords: Diffraction grating
micro resonators
micro scanners
Micro-opto-electromechanical systems (MOEMS)
Issue Date: 2011
Citation: Du, Y.,Zhou, G.,Cheo, K.K.L.,Zhang, Q.,Feng, H.,Chau, F.S. (2011). A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 2546-2549. ScholarBank@NUS Repository. https://doi.org/10.1109/TRANSDUCERS.2011.5969767
Abstract: This paper demonstrates the design, fabrication and characterization of a micromachined electrostatic double-layered vibratory grating scanner for high speed, high optical resolution laser scanning applications. The prototype scanner with a 2mm diameter diffraction grating is capable of scanning a laser beam at around 21.591kHz with an optical scan angle of 33.5°, resulting a θopticalD product (product of optical scan angle and diameter of the diffraction grating) of 67 degmm. The optical resolution of the prototype scanner is measured to be 916 pixels per-unidirectional-scan while scanning in atmosphere. While scanning in vacuum condition, the optical resolution can be estimated to be 1460 pixels per-unidirectional-scan, which is suitable for SXGA (1280 × 1024) resolution scanned beam displays. © 2011 IEEE.
Source Title: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
URI: http://scholarbank.nus.edu.sg/handle/10635/85854
ISBN: 9781457701573
DOI: 10.1109/TRANSDUCERS.2011.5969767
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