Please use this identifier to cite or link to this item: https://doi.org/10.1149/1.1545466
Title: Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene)
Authors: Zhang, Y. 
Kang, E.T. 
Neoh, K.G. 
Ang, S.S. 
Huan, A.C.H. 
Issue Date: Mar-2003
Source: Zhang, Y., Kang, E.T., Neoh, K.G., Ang, S.S., Huan, A.C.H. (2003-03). Surface passivation of (100)-oriented GaAs with ultrathin fluoropolymer films deposited by radio frequency magnetron sputtering of poly(tetrafluoroethylene). Journal of the Electrochemical Society 150 (3) : F53-F59. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1545466
Abstract: Ultrathin fluoropolymer films of about 4 nm in thickness were deposited on the HCl-etched (100)-oriented GaAs single-crystal substrates via radio frequency plasma sputtering of a poly(tetrafluoroethylene) (PTFE) target. X-ray photoelectron spectroscopy (XPS) results indicated that the sputter-deposited PTFE (s-PTFE) ultrathin film, having a dielectric constant comparable to that of the PTFE film (κ ∼ 2.1), could effectively passivate the HCl-etched GaAs(100) substrate under various environments. The growth of the oxide layer was effectively hindered by the s-PTFE barrier when the HCl-etched GaAs(100) surface was exposured to air for several hundred hours. The surface oxidation rate was also reduced significantly in the presence of the s-PTFE barrier when the HCl-etched GaAs(100) was exposed to water and the H2O2 solution. XPS and time-of-flight secondary mass spectrometry results indicated that the deposited s-PTFE film was oxygen-free and consisted of -(CF2)n- units with different end groups. The 180° peel adhesion test results suggested that the s-PTFE film adhered strongly to the GaAs(100) surface.
Source Title: Journal of the Electrochemical Society
URI: http://scholarbank.nus.edu.sg/handle/10635/85709
ISSN: 00134651
DOI: 10.1149/1.1545466
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

23
checked on Feb 25, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.