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Title: Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
Authors: Tay, F.E.H. 
Van Kan, J.A. 
Watt, F. 
Choong, W.O.
Issue Date: Jan-2001
Citation: Tay, F.E.H., Van Kan, J.A., Watt, F., Choong, W.O. (2001-01). Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels. Journal of Micromechanics and Microengineering 11 (1) : 27-32. ScholarBank@NUS Repository.
Abstract: In this paper, a novel method to realize embedded micro-channels is presented. The presented technology is based on a direct write technique using proton beams to pattern thick-film SU-8. This proton micro-machining method allows the production of high aspect ratio and complex three-dimensional micro-structures in polymers with aspect ratios of over 100 and 20 using poly(methylmethacrylate) (PMMA) and SU-8 respectively. As the SU-8 is used as a structural material, its mechanical properties have to be characterized. For a start, the Young's modulus of the proton beam exposed SU-8 is determined using a stylus-type load-deflection method. The second part of this paper describes the underlying theory and method used by the author to determine the Young's modulus of the proton beam exposed SU-8. Measurements of the SU-8 micro-structures show that the Young's modulus is dependent on the proton beam exposure dose. An exposure close of 9.5 nC mm-2 results in an average Young's modulus value of 4.254 GPa.
Source Title: Journal of Micromechanics and Microengineering
ISSN: 09601317
DOI: 10.1088/0960-1317/11/1/305
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