Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2006.886027
Title: Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
Authors: Zhou, G. 
Chau, F.S. 
Keywords: Diffraction grating
Micromirrors
Microscanners
Optical microelectromechanical systems (MEMS)
Issue Date: Dec-2006
Source: Zhou, G., Chau, F.S. (2006-12). Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning. Journal of Microelectromechanical Systems 15 (6) : 1777-1788. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2006.886027
Abstract: This paper presents an effective method to achieve multiwavelength collinear laser scanning using micromachined vibratory grating scanners, which have the potential to scan at high frequencies without the optical performance degradation resulting from dynamic nonrigid-body deformation. An optical simulation model has been developed to predict the scanning patterns of the vibratory grating scanners. The proposed multiwavelength collinear scanning method was studied both analytically with the optical simulation model and experimentally with a prototype device fabricated by the MUMPS polysilicon surface micromachining process. The experimental results agree very well with the simulation data. The prototype scanner demonstrated collinear scanning of 532 nm (green) and 632.8 nm (red) wavelengths laser beams and achieved an optical scan angle of 12.7 degrees with virtually bow-free scan-line at a resonant frequency of 9.9 kHz when driven by electrostatic comb-drive resonators with 60 V dc bias and 32 Vpp ac voltages. © 2006 IEEE.
Source Title: Journal of Microelectromechanical Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/85407
ISSN: 10577157
DOI: 10.1109/JMEMS.2006.886027
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

17
checked on Feb 14, 2018

WEB OF SCIENCETM
Citations

14
checked on Feb 14, 2018

Page view(s)

15
checked on Feb 11, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.