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Title: Microfabricated silicon microneedle array for transdermal drug delivery
Authors: Ji, J.
Tay, F.E.H. 
Miao, J.
Iliescu, C.
Issue Date: 1-Apr-2006
Source: Ji, J., Tay, F.E.H., Miao, J., Iliescu, C. (2006-04-01). Microfabricated silicon microneedle array for transdermal drug delivery. Journal of Physics: Conference Series 34 (1) : 1127-1131. ScholarBank@NUS Repository.
Abstract: This paper presents developed processes for silicon microneedle arrays microfabrication. Three types of microneedles structures were achieved by isotropic etching in inductively coupled plasma (ICP) using SF 6/O2 gases, combination of isotropic etching with deep etching, and wet etching, respectively. A microneedle array with biodegradable porous tips was further developed based on the fabricated microneedles. © 2006 IOP Publishing Ltd.
Source Title: Journal of Physics: Conference Series
ISSN: 17426588
DOI: 10.1088/1742-6596/34/1/186
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