Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1606111
Title: Laser induced transformation of TiSi2
Authors: Lu, L. 
Lai, M.O. 
Issue Date: 1-Oct-2003
Citation: Lu, L., Lai, M.O. (2003-10-01). Laser induced transformation of TiSi2. Journal of Applied Physics 94 (7) : 4291-4295. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1606111
Abstract: Laser induced transformation of TiSi2x was investigated. X-ray diffraction and sheet resistance measurement were used to investigate the phase transformations. The results showed that the formation of C54 phase occured at a lower laser energy density on the amorphous-Si substrate than that on crystalline-Si substrate.
Source Title: Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/85345
ISSN: 00218979
DOI: 10.1063/1.1606111
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