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|Title:||Laser induced transformation of TiSi2|
|Authors:||Lu, L. |
|Citation:||Lu, L., Lai, M.O. (2003-10-01). Laser induced transformation of TiSi2. Journal of Applied Physics 94 (7) : 4291-4295. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1606111|
|Abstract:||Laser induced transformation of TiSi2x was investigated. X-ray diffraction and sheet resistance measurement were used to investigate the phase transformations. The results showed that the formation of C54 phase occured at a lower laser energy density on the amorphous-Si substrate than that on crystalline-Si substrate.|
|Source Title:||Journal of Applied Physics|
|Appears in Collections:||Staff Publications|
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