Please use this identifier to cite or link to this item: https://doi.org/10.1557/jmr.2009.0397
Title: Highly wear resistant chemisorbed polar ultra-high-molecular-weight polyethylene thin film on Si surface for micro-system applications
Authors: Satyanarayana, N. 
Sinha, S.K. 
Lim, S.-C. 
Issue Date: Nov-2009
Citation: Satyanarayana, N., Sinha, S.K., Lim, S.-C. (2009-11). Highly wear resistant chemisorbed polar ultra-high-molecular-weight polyethylene thin film on Si surface for micro-system applications. Journal of Materials Research 24 (11) : 3331-3337. ScholarBank@NUS Repository. https://doi.org/10.1557/jmr.2009.0397
Abstract: We report deposition and tribological studies of a chemisorbed UHMWPE (ultra-high-molecular-weight polyethylene) film on an Si surface. UHMWPE molecules containing carboxyl and hydroxyl chemical groups were chemisorbed onto an Si surface using an intermediate GPTMS SAM (glycidoxypropyltrimethoxy silane self-assembled monolayer) layer. The carboxyl and hydroxyl groups of UHMWPE molecules react with the terminal epoxy groups of GPTMS SAM during chemisorption. The resultant film (̃1.4 μm thick) has shown low coefficient of friction (̃0.1) and high wear life (exceeding 100,000 cycles) in a sliding test against a 4 mm diameter Si3N4 ball at a normal load of 0.3 N and a sliding velocity of 0.042 m/s measured on a micro-tribometer. In contrast, bare Si or GPTMS SAM modified Si has shown a higher coefficient of friction and failed within a few tens of sliding cycles. The high wear durability of the chemisorbed polymer film is attributed to the excellent adhesion of the UHMWPE film with the substrate due to chemisorption and to the good lubrication properties of UHMWPE molecules. This wear resistant film has potential applications in micro-electro-mechanical systems made of Si. © 2009 Materials Research Society.
Source Title: Journal of Materials Research
URI: http://scholarbank.nus.edu.sg/handle/10635/85275
ISSN: 08842914
DOI: 10.1557/jmr.2009.0397
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

10
checked on Dec 11, 2018

WEB OF SCIENCETM
Citations

8
checked on Nov 26, 2018

Page view(s)

60
checked on Dec 7, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.