Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0141-6359(01)00076-9
Title: Design of an optical probe for testing surface roughness and micro-displacement
Authors: Wang, S.H. 
Jin, C.J.
Tay, C.J. 
Quan, C. 
Shang, H.M. 
Keywords: Light scattering
Micro-displacement
Optical probe
Optical triangulation
Surface roughness
Issue Date: Oct-2001
Source: Wang, S.H., Jin, C.J., Tay, C.J., Quan, C., Shang, H.M. (2001-10). Design of an optical probe for testing surface roughness and micro-displacement. Precision Engineering 25 (4) : 258-265. ScholarBank@NUS Repository. https://doi.org/10.1016/S0141-6359(01)00076-9
Abstract: This paper presents a practical monitoring tool for measurements of surface roughness and micro-displacement. An optical probe of the methods based on light scattering for measuring surface roughness and optical triangulation for measuring micro-displacement is described. The proposed technique allows evaluation of surface roughness and micro-displacement of specimen by using just one device. The theoretical models of surface roughness and micro-displacement measurements have been established for the probe. The measuring principles applied in the design are described in detail and the validity of the design is demonstrated by experimental evaluations. The experimental results show that, for specimens with surface roughnesses Ra in the range from 0.005μm to 0.1 μm, micro-displacement measurements in the linear range of ± 300μm can be obtained. © 2001 Elsevier Science Inc. All rights reserved.
Source Title: Precision Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/84965
ISSN: 01416359
DOI: 10.1016/S0141-6359(01)00076-9
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

9
checked on Apr 24, 2018

WEB OF SCIENCETM
Citations

6
checked on Apr 24, 2018

Page view(s)

17
checked on Mar 12, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.