Please use this identifier to cite or link to this item: https://doi.org/10.1007/s11249-011-9835-1
Title: A tribological study of SU-8 micro-dot patterns printed on Si surface in a flat-on-flat reciprocating sliding test
Authors: Beng, N. 
Minn, T.M. 
Sinha, S.K. 
Keywords: Micropatterning
SU-8
Tribology
Issue Date: Nov-2011
Source: Beng, N., Minn, T.M., Sinha, S.K. (2011-11). A tribological study of SU-8 micro-dot patterns printed on Si surface in a flat-on-flat reciprocating sliding test. Tribology Letters 44 (2) : 167-176. ScholarBank@NUS Repository. https://doi.org/10.1007/s11249-011-9835-1
Abstract: Tribological properties of optimized SU-8 micro-dot patterns on Silicon (Si) were evaluated using a flat-on-flat tribometer. Sliding tests on the patterns were conducted against a SU-8 spin-coated 2×2 mm 2 Si substrate at varying normal loads at a fixed rotational speed. It was observed that the pitch of the SU-8 pattern on Si substrate had significant influence on the wear durability. Ultra-thin layer of perfluoropolyether was over-coated onto SU-8 micro-dot patterned specimens for enhanced wear durability, and the specimen of the optimized pitch 450 m has shown a wear life of more than 100,000 cycles at a normal load of 650 mN. © Springer Science+Business Media LLC 2011.
Source Title: Tribology Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/84834
ISSN: 10238883
DOI: 10.1007/s11249-011-9835-1
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