Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.4865112
Title: Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscope
Authors: Ang, K.T.
Fang, Z.P.
Tay, A. 
Issue Date: Feb-2014
Source: Ang, K.T., Fang, Z.P., Tay, A. (2014-02). Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscope. Review of Scientific Instruments 85 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4865112
Abstract: Miniature pillars are three-dimensional (3D) features commonly found in microfluidic device. These features are usually employed as filters. Non-confocal profilometers have difficulties in measuring 3D topography of pillar structures in transparent microfluidic devices. Confocal sensors can be used to measure the 3D topography of pillar structures but they are usually time consuming due to the scanning process. We have developed a technique to measure 3D topography using a modified confocal microscope with a spinning Nipkow disk and chromatic confocal technique. Experimental results on a microfluidic device with pillar structures demonstrate the feasibility of the proposed technique. Our technique is suitable for in situ, real time measurement of microfluidic device at production speed since it requires only one confocal image to complete a measurement. © 2014 AIP Publishing LLC.
Source Title: Review of Scientific Instruments
URI: http://scholarbank.nus.edu.sg/handle/10635/84435
ISSN: 00346748
DOI: 10.1063/1.4865112
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