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|Title:||Ultra-narrow silicon nanowire gate-all-around CMOS devices: Impact of diameter, channel-orientation and low temperature on device performance|
|Citation:||Singh, N.,Lim, F.Y.,Fang, W.W.,Rustagi, S.C.,Bera, L.K.,Agarwal, A.,Tung, C.H.,Hoe, K.M.,Omampuliyur, S.R.,Tripathi, D.,Adeyeye, A.O.,Lo, G.Q.,Balasubramanian, N.,Kwong, D.L. (2006). Ultra-narrow silicon nanowire gate-all-around CMOS devices: Impact of diameter, channel-orientation and low temperature on device performance. Technical Digest - International Electron Devices Meeting, IEDM : -. ScholarBank@NUS Repository. https://doi.org/10.1109/IEDM.2006.346840|
|Abstract:||Fully CMOS compatible Silicon-nanowire (SiNW) Gate-All-Around (GAA) n- and p-MOS transistors are fabricated with nanowire channel in different crystal orientations and characterized at various temperatures down to 5K. SiNW width is controlled in 1 nm steps and varied from 3 to 6 nm. Devices show high drive current (2.4 mA/μm for n-FET, 1.3 mA/μm for p-FET), excellent gate control, and reduced sensitivity to temperature. Strong evidences of carrier confinement are noticed in term of Id-V8 oscillations and shift in threshold voltage with SiNW diameter. Orientation impact has been investigated as well.|
|Source Title:||Technical Digest - International Electron Devices Meeting, IEDM|
|Appears in Collections:||Staff Publications|
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