Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2010.5672154
Title: Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application
Authors: Koh, K.H.
Kobayashi, T.
Lee, C. 
Issue Date: 2010
Source: Koh, K.H.,Kobayashi, T.,Lee, C. (2010). Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 119-120. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2010.5672154
Abstract: A gold coated silicon mirror (5mm x 5mm) actuated by 1x10 piezoelectric Pb(Zr,Ti)O3 (PZT) array actuator integrated on a cantilever beam has been demonstrated for variable optical attenuator (VOA) application. Torsional attenuation based on the difference in the dc biasing voltage applied to the 1x10 PZT array actuator was investigated. The dynamic attenuation range of 40dB at 1.8V DC bias is observed in the attenuation curve. ©2010 IEEE.
Source Title: 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/84310
ISBN: 9781424489251
DOI: 10.1109/OMEMS.2010.5672154
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