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|Title:||Superjunction power LDMOS on partial SOI platform|
|Citation:||Chen, Y., Buddharaju, K.D., Liang, Y.C., Samudra, G.S., Feng, H.H. (2007). Superjunction power LDMOS on partial SOI platform. Proceedings of the International Symposium on Power Semiconductor Devices and ICs : 177-180. ScholarBank@NUS Repository. https://doi.org/10.1109/ISPSD.2007.4294961|
|Abstract:||Superjunction power LDMOS device implemented on the bulk Si substrate suffers from the substrate-assisted depletion (SAD) effect, which causes the charge imbalance, and thus limits the device performance. A new SJ-LDMOS structure integrated on the partial SOI (PSOI) platform is proposed in this paper, which eliminates the SAD completely and enables the making of SJ-LDMOS on bulk silicon substrate without sacrificing its electrical and thermal performance. The PSOI SJ-LDMOS was fabricated and characterized. The tested PSOI SJ-LDMOS exhibits a specific on-state resistance of 1.01mΩ-cm2 while the breakdown voltage is 72.3V. © 2007 IEEE.|
|Source Title:||Proceedings of the International Symposium on Power Semiconductor Devices and ICs|
|Appears in Collections:||Staff Publications|
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