Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.456860
Title: Steam-assisted laser ablation metal substrate
Authors: Koh, M.L.
Hong, M.H. 
Zhu, S.
Lu, Y.F. 
Keywords: Ablation profiles
Acoustic waveform
Laser ablation
Laser fluence
Laser pulse counts and ambient processing environment
Issue Date: 2002
Citation: Koh, M.L., Hong, M.H., Zhu, S., Lu, Y.F. (2002). Steam-assisted laser ablation metal substrate. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 47-50. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456860
Abstract: Excimer laser irradiation has been shown to produce novel effects when used to process metallic surfaces. The effect of a thin film of steam on copper specimens has been investigated, and the results are a vast improvement in comparison to ablation in ambient air or liquid. This can be observed from the acoustic waveform detection during the ablation process. A pulsed excimer laser was used to ablate copper samples with fluence levels ranging from (2.5 J/cm2) to (3.8 J/cm2). The peak-to-peak signals detected in steam are about twice the amplitude of those obtained in air. Ablated specimens have been characterized using alpha-step scans for ablation profiles. Results show that the ablation rates with steam are higher than those done in ambient air or liquid. Discussions will focus on the assessment of factors influencing the production of such features, including laser fluence, laser pulse counts, and also the ambient processing environment.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/84224
ISSN: 0277786X
DOI: 10.1117/12.456860
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