Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2007.4373848
Title: Photothermally actuated microcantilever beams using nanoparticles
Authors: Chen, C.N.
Hsieh, C.M.
Tsai, C.G.
Yeh, J.A.
Lee, C. 
Keywords: Microcantilever beam
Nanoparticles
Photothermally
Issue Date: 2007
Citation: Chen, C.N., Hsieh, C.M., Tsai, C.G., Yeh, J.A., Lee, C. (2007). Photothermally actuated microcantilever beams using nanoparticles. 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS : 77-78. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2007.4373848
Abstract: Photothermally actuated microcantilever beams based on localized surface plasmons (LSPs) of nanoparticles (NPs) were used to modulate absorption efficiency. The bimaterial beams were composed of 200 nm thick poly(vinylpyrrolidone) (PVP) embedded with silver (Ag) NPs and 370 nm thick silicon nitride. NPs were designed to have a strong absorption at about 532 nm and convert the absorbed light energy to heat. The beams had a vertical deflection of 30μm under the excitation of 532nm green laser with an intensity of 500 W/cm2. The corresponding mechanical and thermal response times were 0.27 ms and 10 ms, respectively. © 2007 IEEE.
Source Title: 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
URI: http://scholarbank.nus.edu.sg/handle/10635/84094
ISBN: 1424406412
DOI: 10.1109/OMEMS.2007.4373848
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