Please use this identifier to cite or link to this item: https://doi.org/10.1109/FREQ.2008.4623079
Title: Nonlinear behavior of Lamé-mode SOI bulk resonator
Authors: Shao, L.C.
Palaniapan, M. 
Khine, L.
Tan, W.W. 
Issue Date: 2008
Citation: Shao, L.C., Palaniapan, M., Khine, L., Tan, W.W. (2008). Nonlinear behavior of Lamé-mode SOI bulk resonator. 2008 IEEE International Frequency Control Symposium, FCS : 646-650. ScholarBank@NUS Repository. https://doi.org/10.1109/FREQ.2008.4623079
Abstract: In this paper, we report for the first time the detailed analysis of the nonlinear behavior of a Lamé-mode SOI bulk resonator. The measured resonant frequency of the resonator was 6.35MHz with a quality factor of 1.7 million in the ambient pressure of 0.02Pa. We used the two-step semi-analytic approach to characterize the model parameters of the resonator and the nonlinear model of the resonator was verified by the experimental results. Our study shows that the Lamé-mode bulk resonator has three orders of magnitude larger maximum energy storage capability than the flexural beam resonator, leading to improved overall phase noise performance of the resonator-based oscillator. © 2008 IEEE.
Source Title: 2008 IEEE International Frequency Control Symposium, FCS
URI: http://scholarbank.nus.edu.sg/handle/10635/84013
ISBN: 9781424417957
DOI: 10.1109/FREQ.2008.4623079
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

10
checked on Nov 14, 2018

WEB OF SCIENCETM
Citations

3
checked on Nov 6, 2018

Page view(s)

27
checked on Oct 5, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.