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|Title:||Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching|
LiNbO3 dense arrays
|Source:||Si, G.Y.,Danner, A.J.,Teng, J.H.,Ang, S.S.,Chew, A.B.,Dogheche, E. (2010-08). Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching. International Journal of Nanoscience 9 (4) : 311-315. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X10006867|
|Abstract:||Channel waveguides have been fabricated in x-cut lithium niobate (LiNbO3) by proton exchange (PE) method and optically measured. The thickness and the optical constants of the thin PE layer were characterized using a prism coupling technique. The PE area was plasma etched and a 2.775-μm total etching depth was achieved. The measured average etching rate is 92.5 nm/min. One- and two-dimensional dense arrays of LiNbO3 nanostructures have also been fabricated by using interference lithography (IL) and inductively coupled plasma reactive ion etching (ICP-RIE) techniques. © 2010 World Scientific Publishing Company.|
|Source Title:||International Journal of Nanoscience|
|Appears in Collections:||Staff Publications|
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