Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSTQE.2009.2016578
Title: Nanophotonics sensor based on microcantilever for chemical analysis
Authors: Xiang, W. 
Lee, C. 
Keywords: MEMS
Microcantilever
Nanomechanical sensor
NEMS
Photonic crystal resonator
Issue Date: Sep-2009
Citation: Xiang, W., Lee, C. (2009-09). Nanophotonics sensor based on microcantilever for chemical analysis. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1323-1326. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2016578
Abstract: A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z-displacement and strain of Si/SiO2 cantilever sensor are derived as 0.6 μm and 0.0098% in water and 0.812 μm and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution. © 2009 IEEE.
Source Title: IEEE Journal on Selected Topics in Quantum Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/83997
ISSN: 1077260X
DOI: 10.1109/JSTQE.2009.2016578
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

16
checked on May 13, 2018

WEB OF SCIENCETM
Citations

15
checked on Apr 24, 2018

Page view(s)

50
checked on May 18, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.