Please use this identifier to cite or link to this item: https://doi.org/10.1109/IMWS-BIO.2013.6756260
Title: MEMS/NEMS based enabling technologies for self-sustained wireless sensor nodes
Authors: Lee, C. 
Keywords: drug delivery
energy harvesting
flow sensor
MEMS
NEMS
pressure sensor
Issue Date: 2013
Source: Lee, C. (2013). MEMS/NEMS based enabling technologies for self-sustained wireless sensor nodes. 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings : -. ScholarBank@NUS Repository. https://doi.org/10.1109/IMWS-BIO.2013.6756260
Abstract: Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) technologies have enabled novel ultracompact sensors. Ranging from various low-power sensors, energy harvesters, to advanced system-in-package (SiP) technology, MEMS and NEMS devices and fabrication technology have proven themselves as indispensable and enabling technologies for realization of the self-sustained wireless sensor nodes. This paper reports the state of the art progress which indicates bright future of self-sustained wireless sensor nodes. © 2013 IEEE.
Source Title: 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/83942
DOI: 10.1109/IMWS-BIO.2013.6756260
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