Please use this identifier to cite or link to this item: https://doi.org/10.1109/PGC.2010.5705964
Title: MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
Authors: Koh, K.H.
Kobayashi, T.
Lee, C. 
Issue Date: 2010
Source: Koh, K.H.,Kobayashi, T.,Lee, C. (2010). MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators. 2010 Photonics Global Conference, PGC 2010 : -. ScholarBank@NUS Repository. https://doi.org/10.1109/PGC.2010.5705964
Abstract: A gold coated silicon mirror (5mm × 5mm) actuated by piezoelectric Pb(Zr,Ti)O3 (PZT) cantilever beams has been investigated for variable optical attenuator applications. The device is micromachined from a SOI substrate with 5μm thick Si device layer, with multi-layers of Pt/Ti/PZT/Pt/Ti deposited as electrode materials. A large Si mirror plate and a 1×10 arrayed PZT cantilevers arranged in parallel are formed after the release process. The ten cantilevers are designed to be electrically isolated from one another. A dual core fiber collimator is aligned perpendicularly to the mirror in a three-dimensional (3-D) light attenuation arrangement. Two modes of attenuation mechanisms were investigated based on bending and torsional effects. A dynamic attenuation range of 40dB achieved at 1V and 1.8V for bending and torsional mode respectively.
Source Title: 2010 Photonics Global Conference, PGC 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/83941
ISBN: 9781424498826
DOI: 10.1109/PGC.2010.5705964
Appears in Collections:Staff Publications

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