Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.proeng.2011.12.173
| DC Field | Value | |
|---|---|---|
| dc.title | Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator | |
| dc.contributor.author | Koh, K.H. | |
| dc.contributor.author | Kobayashi, T. | |
| dc.contributor.author | Liu, H. | |
| dc.contributor.author | Lee, C. | |
| dc.date.accessioned | 2014-10-07T04:46:02Z | |
| dc.date.available | 2014-10-07T04:46:02Z | |
| dc.date.issued | 2011 | |
| dc.identifier.citation | Koh, K.H., Kobayashi, T., Liu, H., Lee, C. (2011). Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator. Procedia Engineering 25 : 701-704. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.173 | |
| dc.identifier.issn | 18777058 | |
| dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83861 | |
| dc.description.abstract | A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror. © 2011 Published by Elsevier Ltd. | |
| dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.proeng.2011.12.173 | |
| dc.source | Scopus | |
| dc.subject | Micro-electro-mechanical systems (MEMS) | |
| dc.subject | Optical MEMS | |
| dc.subject | Piezoelectric actuator | |
| dc.subject | PZT | |
| dc.type | Conference Paper | |
| dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
| dc.description.doi | 10.1016/j.proeng.2011.12.173 | |
| dc.description.sourcetitle | Procedia Engineering | |
| dc.description.volume | 25 | |
| dc.description.page | 701-704 | |
| dc.identifier.isiut | 000300512400170 | |
| Appears in Collections: | Staff Publications | |
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