Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.proeng.2011.12.173
| Title: | Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| Authors: | Koh, K.H. Kobayashi, T. Liu, H. Lee, C. |
| Keywords: | Micro-electro-mechanical systems (MEMS) Optical MEMS Piezoelectric actuator PZT |
| Issue Date: | 2011 |
| Citation: | Koh, K.H., Kobayashi, T., Liu, H., Lee, C. (2011). Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator. Procedia Engineering 25 : 701-704. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.173 |
| Abstract: | A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror. © 2011 Published by Elsevier Ltd. |
| Source Title: | Procedia Engineering |
| URI: | http://scholarbank.nus.edu.sg/handle/10635/83861 |
| ISSN: | 18777058 |
| DOI: | 10.1016/j.proeng.2011.12.173 |
| Appears in Collections: | Staff Publications |
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