Please use this identifier to cite or link to this item:
|Title:||Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator|
|Keywords:||Micro-electro-mechanical systems (MEMS)|
|Citation:||Koh, K.H., Kobayashi, T., Liu, H., Lee, C. (2011). Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator. Procedia Engineering 25 : 701-704. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.173|
|Abstract:||A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror. © 2011 Published by Elsevier Ltd.|
|Source Title:||Procedia Engineering|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 15, 2019
WEB OF SCIENCETM
checked on Jan 30, 2019
checked on Feb 1, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.