Please use this identifier to cite or link to this item: https://doi.org/10.1109/Transducers.2013.6626911
Title: Fabrication and characterization of a silicon nanofin non-volatile memory
Authors: Soon, B.
Singh, N.
Tsai, J.M.
Lee, C. 
Keywords: Nanoelectromechanical system
NEMS
non-volatile memory
relay
switch
van der Waals
Issue Date: 2013
Citation: Soon, B.,Singh, N.,Tsai, J.M.,Lee, C. (2013). Fabrication and characterization of a silicon nanofin non-volatile memory. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 : 892-895. ScholarBank@NUS Repository. https://doi.org/10.1109/Transducers.2013.6626911
Abstract: This paper reports the fabrication and characterization of a bi-stable non-volatile device based on nanoelectromechanical system. The device consists of a silicon nanofin (SiNF) of 2, 8, 12 μm length by 90 nm thick which can be switched bi-directionally and achieve two stable geometrical position. After switching, the hysteresis behavior is realized through the nature van der Waals force that holds the SiNF to the surface of the contact terminal. Measurement results show bi-stable hysteresis behavior with pull-in voltage, VPI at 10V and reset voltage, VRESET at -12V. The measured voltage drift of this device is 24mV/°C from 50°C to 150°C. © 2013 IEEE.
Source Title: 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
URI: http://scholarbank.nus.edu.sg/handle/10635/83720
ISBN: 9781467359818
DOI: 10.1109/Transducers.2013.6626911
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