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|Title:||Effective suppression of fermi level pinning in poly-Si/HfO2 gate stack by using poly-SiGe gate|
|Citation:||Yu, X.,Yu, M.,Zhu, C. (2007). Effective suppression of fermi level pinning in poly-Si/HfO2 gate stack by using poly-SiGe gate. ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings : 149-151. ScholarBank@NUS Repository. https://doi.org/10.1109/ICSICT.2006.306123|
|Abstract:||In this work, we have demonstrated that the Fermi level pinning in poly-Si/HfO2 can be effectively suppressed by using poly-SiGe gate. Threshold voltage of -1.02 V in poly-Si/HfO2 PFET was tuned to -0.81 V in poly-Si/Al2O3/HfO2, and further reduced to -0.49 V in poly-Si/poly-SiGe/Al2O3/HfO2. At the same time, Vth, of 0.3 V for NFET was achieved in this poly-SiGe gate stack. Moreover, Vuth stability was remarkably improved by using poly-SiGe gate and Al2O3 capping layer. The improvements shown in this poly-SiGe gate stack could be due to the suppressed formation of oxygen vacancies. © 2006 IEEE.|
|Source Title:||ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings|
|Appears in Collections:||Staff Publications|
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