Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2011.6031057
Title: Development of CMOS MEMS thermal bimorph actuator for driving microlens
Authors: Koh, K.H.
Lee, C. 
Lu, J.-H.
Chen, C.-C.
Keywords: Microlens
Optical Microelectromechanical Systems
Thermal Actuator
Issue Date: 2011
Source: Koh, K.H.,Lee, C.,Lu, J.-H.,Chen, C.-C. (2011). Development of CMOS MEMS thermal bimorph actuator for driving microlens. International Conference on Optical MEMS and Nanophotonics : 153-154. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031057
Abstract: A CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc. © 2011 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/83625
ISBN: 9781457703362
ISSN: 21605033
DOI: 10.1109/OMEMS.2011.6031057
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