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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/83624
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dc.titleDevelopment of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
dc.contributor.authorKoh, K.H.
dc.contributor.authorKobayashi, T.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:43:18Z
dc.date.available2014-10-07T04:43:18Z
dc.date.issued2011
dc.identifier.citationKoh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository.
dc.identifier.isbn9781612842882
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83624
dc.description.abstractNovel actuation mechanisms for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications. © 2011 National Sun Yat-Sen Univ.
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.sourcetitle16th Opto-Electronics and Communications Conference, OECC 2011
dc.description.page323-324
dc.identifier.isiutNOT_IN_WOS
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