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|Title:||Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators|
|Source:||Koh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository.|
|Abstract:||Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications. © 2011 National Sun Yat-Sen Univ.|
|Source Title:||16th Opto-Electronics and Communications Conference, OECC 2011|
|Appears in Collections:||Staff Publications|
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