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| Title: | Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators | Authors: | Koh, K.H. Kobayashi, T. Lee, C. |
Issue Date: | 2011 | Citation: | Koh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository. | Abstract: | Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications. © 2011 National Sun Yat-Sen Univ. | Source Title: | 16th Opto-Electronics and Communications Conference, OECC 2011 | URI: | http://scholarbank.nus.edu.sg/handle/10635/83624 | ISBN: | 9781612842882 |
| Appears in Collections: | Staff Publications |
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