Please use this identifier to cite or link to this item:
|Title:||Computational study of NEMS diaphragm sensor using triple nano-ring resonator|
|Citation:||Li, B., Lee, C. (2010). Computational study of NEMS diaphragm sensor using triple nano-ring resonator. Procedia Engineering 5 : 1418-1421. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2010.09.381|
|Abstract:||We propose a circular Si diaphragm of hexagonal photonic crystal (PhC) lattice with triple nano-ring (TNR) resonator created at the center as a nano-scale force sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak with Q-factor of 1412. The resonant wavelength peak shifts upon the applied force at the centre of the circular diaphragm along the normal direction in terms of a 2nd-order polynomial relationship. This device can detect wide range of applied force and gives minimum detectable force of 0.847 μN in the region of applied force from 15 to 20 μN. An interesting dual channel reversibility (DCR) phenomenon is reported. More clearly, resonant peaks of the same wavelength are obtained when the input port is swapped between the two waveguides, i.e., the waveguide on the single nano-ring side and the other waveguide on the horizontal nano-rings side.|
|Source Title:||Procedia Engineering|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 17, 2018
WEB OF SCIENCETM
checked on Sep 5, 2018
checked on Sep 7, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.