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|Title:||Carbon- and tin- Incorporated source/drain stressors for CMOS transistors|
|Citation:||Yeo, Y.-C. (2008). Carbon- and tin- Incorporated source/drain stressors for CMOS transistors. ECS Transactions 16 (10) : 39-46. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2986751|
|Abstract:||We explore several technology options for forming latticemismatched source/drain (S/D) stressors for enhancing the performance of complementary metal-oxide-semiconductor (CMOS) field-effect transistors. Recent research on silicon-carbon (Si:C or Sil-yCy) S/D stressors for n-FETs will be reviewed. Device integration work involving epitaxial Si:C S/D with high carbon concentration and in situ doping, as well as alternative technologies for forming Si:C S/D, e.g. using implantation and anneal, will be discussed. For p-FETs, tin-incorporated S/D stressors will be explored. Integration of new stressors in advanced device architectures is expected to enable the realization of ultimate CMOS performance. ©The Electrochemical Society.|
|Source Title:||ECS Transactions|
|Appears in Collections:||Staff Publications|
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